Publications

 
Symmetrical periods in antireflective coatings for plastic optics
  Plastic optical parts require antireflective as well as hard coatings. A novel design concept for coating plastics combines both functions.   more...  
 
Spectral-sensitive on-chip masking of Si-PIN-diodes using patterned and self-blocked optical coatings
  The manufacturing processes for spectral-sensitive on-chip masking of Si-PIN-diodes using thin-film optical filters are described. As two examples, a diode array with red, green, and blue filters (RGB) and a UV-sensitive diode are explained in detail.   more...  
 
Graded reflectance mirror design with unconventional profile for excimer laser
  The design of a graded reflectance mirror (GRM) for KrF excimer laser has been developed.The mirror consists of three areas of reflectance: (1) a rectangular area in the middle of the substrate with reflectance R1 ~ 10%,...   more...  
 
Abrasion resistant antireflection coating for plastics
  Coating of plastics for optical applications is mostly intended to improve their mechanically durability and to provide a desired optical function.   more...  
 
 
 
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